Dimensions measured by image shearing microscope - Metrology & Quality Control

Q.  Which dimensions can be measured using image shearing microscope?
- Published on 07 Aug 15

a. linear dimensions
b. angular dimensions
c. both linear and angular dimensions
d. none of the above

ANSWER: linear dimensions

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    Discussion

  • Sravanthi   -Posted on 27 Oct 15
    - A microscope is used to measure linear dimensions of an object in image shearing technique

    - Image shearing microscope is used for accurate measurement of integrated circuits, wafers and photo masks.

    - In this method, the images obtained are superimposed and moved by a calibrated mechanism. First reading is taken noted when two images are in edge to edge contact and second reading is noted after both images overlap. The length of the workpiece is obtained by subtracting the two readings.

    - Single and double shear methods are used for this purpose. To achieve greater accuracy double shear is used.

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