Which is the typical value of silicon wafer especially for wafer cleaning strategy?

Which is the typical value of silicon wafer especially for wafer cleaning strategy?

a) 0.5 micrometer
b) 0.5 nanometer
c) 10 micrometer
d) 10 nanometer

Correct Answer : a) 0.5 micrometer

Explanation :

Wafer cleaning assist finely for dimensional parameters usually in terms of standard micrometers (typically 0.5) since nanometer size is highly inconvenient.